Parts Repair

PRODUCER CERAMIC HEATER 300MM
PRODUCER CERAMIC HEATER 300MM
LASER TUBE
INDEXER 2200
LASER TUBE
INDEXER 2200
LASER TUBE
INDEXER 2200

半導體料件維修

Parts Repair

VHP ROBOT
HP ROBOT
NSK ELA DRIVER
NSK ESA DRIVER
MOTOR
CHILLER
DRY PUMP
TURBO PUMP
LASER TUBE
LIGHT PEN
5 PHASE DRIVER
ENDPOINT MODULE PC
MONOCHROMATOR
H.V MODULE(DPS/SUPER-E/MXP)
HOT PACK
ENDPOINT FIBER
DPS PLASMA DETECT SENSOR
POWER SUPPLY
GENERATOR
GATE VALVE
SLIT VALVE

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